About Us

Semiconductor and LCD lithography equipment has become essential for world industries. Because semiconductor lithography equipment is used for printing minute circuits on semiconductors, which are key devices supporting the information-oriented society. LCD lithography equipment is used for printing minute circuits on LCD panels incorporated in LCD television which are popularizing rapidly at home.

The minute exposure technology of semiconductor lithography equipment (stepper) has evolved in particular to g-line, i-line and excimer laser (KrF/ArF) steppers. Furthermore, EUVL (Extreme Ultra Violet Lithography), which is super minute exposure technology, has been developed as the next generation lithography.
As for lithography equipment for LCD displays, panel size has been enlarged to 6th, 7th, 8th and the next generation.

Based on the original high precision surface processing/multi-layer thin film coating technology enhanced by the longtime experience, NITTO OPTICAL has produced various optical parts (high precision prisms, long bar mirrors, corner cube prisms, etc.). Those optics are used for EB (electron beam) lithography equipment which produces tininess masks, for SEM (Scanning Electron Microscope) which analyzes and measures semiconductor defects, and for the mechanisms of stage and illumination of semiconductor/LCD lithography equipment. For LCD lithography equipment, over 3,000mm ultra long bar mirrors can be produced.
In addition, various optical materials such as glass or ceramics can be selected for bar mirrors depending on customers requirements.