Others
Gratings

: Diffraction Gratings
Diffraction Grating is an optical element that disperses light by diffraction.
The light diffracted from accurately fabricated grooves is separated into zero-order and multiple higher-order diffraction orders.
NITTO OPTICAL fabricates diffraction gratings by micro-patterning technology.
- Fiber Optics
- Acoustooptic Equipment
- Spectral Equipment
Beam Path

Etalons

Etalons are typically made of a transparent plate with two reflecting surfaces, or two parallel highly-reflecting mirrors. These transmission spectrums as a function of wavelength exhibit peaks of large transmission corresponding to resonances of the etalon. NITTO OPTICAL produces optical elements compatible with KrF/ArF lasers.
- Fiber Optics (Active systems – Devices for DFB Laser Wavelength Locker)
- Semiconductors/LCD Lithography Equipment
- Measuring Instruments
- Interferometers
- Measuring Instruments (Wavelength Narrowing Element)
Fabry-perot Etalon

: Air Gapped Etalon
Fabry-perot Etalon (air-gap etalon) is an optical element with multiple reflections.
It consists of two parallel flat plates (optical flats) with high reflectivity, fixed at a specific spacing and in parallel.
On the reflecting surfaces, reflective coatings corresponding to the wavelength are deposited.
It is used for narrowband filters in optical communication and for excimer lasers in semiconductor manufacturing equipment.
- Fiber Optics (Active systems – Devices for DFB Laser Wavelength Locker)
- Semiconductors/LCD Lithography Equipment
- Measuring Instruments
- Interferometers
Polishing Characteristics Data

Solid Etalon

: Optical Flat
This is a high-precision parallel plate type Etalon. It is used for DFB laser wavelength lockers for Fiber Optics. High finesse characteristics in Free Spectral Range (FSR) are achieved by high precision technology of controlling thickness, parallelism, and surface flatness.
- Fiber Optics (Active systems – Devices for DFB Laser Wavelength Locker)
- Semiconductors/LCD Lithography Equipment
- Measuring Instruments (Wavelength Narrowing Element)
Polishing Characteristics Data

Mask Blanks

Mask blanks are substrates for photomasks, indispensable for micro-patterning.
NITTO OPTICAL provides substrates finished with high precision.
- Semiconductors/LCD Lithography Equipment
Glass for EUV Mask Blanks

Glass for EUV Mask Blanks are high-precision optical substrates designed for extreme ultraviolet (EUV) lithography.
They are used as indispensable components for next-generation semiconductor manufacturing.
NITTO OPTICAL provides substrates finished with high precision.
- Semiconductors/LCD Lithography Equipment
Wavelength Conversion Element

By performing high-precision polishing and coating process (AR) on variously processed crystals, excellent durability against laser power is realized.
- Measuring Instruments
Beam Path

Spectral Characteristics / Specifications

CaF2 (Calcium Fluoride) Optical Elements

: CaF2 Single Crystal
CaF2(Calcium fluoride) has high broadband transmission characteristics and shows superb transmission performance from the vacuum ultraviolet to infrared optical range.
- Semiconductors/LCD Lithography Equipment
CaF2 Prism

CaF2prism has high transmittance over a wide wavelength range and is used for optical applications from ultraviolet to infrared.
With its low refractive index and low dispersion characteristics, it enables high-precision optical control with reduced chromatic aberration.
At NITTO OPTICAL, a production system has been established to perform stable mass-production polishing and durable coating processes for this crystal, which is difficult to handle during processing.
- Semiconductors/LCD Lithography Equipment
Beam Path

Schwarzschild Optical System

Schwarzschild optical system is a reflective optical system composed of a combination of spherical mirrors, designed to correct spherical aberration and coma aberration on the optical axis.
- Semiconductors/LCD Lithography Equipment
Beam Path

Optical design and manufacturing

NITTO OPTICAL proposes one-stop solution from optical design to mass production.
We propose the best optical design according to customer requirements and applications.
At the design stage, we carry out layout and mechanical design according to the purpose, and optimize the structure of the entire module.
Furthermore, we consistently handle everything from manufacturing of optical components such as lenses, prisms, and filters to assemblies. At the prototype stage, we quickly fabricate verification prototypes and support development for product realization. A mass production system is also established, enabling stable product supply with reliable quality.
With a system that can provide one-stop service from design to manufacturing and mass production, we strongly support customers’ requirement.


