Mirrors

Bar Mirrors are used for the control system in the X-Y stage of lithography equipment. The performance of the X-Y stage determines the required accuracy for the bar mirror. High-precision Bar mirrors show excellent performance. NITTO OPTICAL provides bar mirrors in various sizes and wide selection of materials such as ceramics.
NITTO OPTICAL guarantees the surface flatness below λ using the ZYGO 32″(Φ800) Interferometer and the ZYGO 12″ (Φ300) Interferometer.

Size: from 100mm to over 3,500mm.
Surface Flatness from several μm level to λ or less.
Please contact us for details about specifications. (Materials, Shape, Surface Flatness, etc.)

• Semiconductors/LCD Lithography Equipment

Beam Path

Beam Path

Nitto Optical is capable of processing ultra long bar mirrors over 3,000 mm in length.
We have established a system to realize the processing of special-sized bar mirrors while maintaining high precision and stable quality.
We are also continuously developing technologies for even longer sizes to further enhance our capability to meet customer needs.

• Semiconductors/LCD Lithography Equipment

Beam Path

Beam Path

Ultra Low Expansion Glass-ceramic bar mirror has extremely small dimensional change against temperature variation, enabling precise control of optical stages.

• Semiconductors/LCD Lithography Equipment

Beam Path, Polishing Characteristics

Beam Path

Polishing Characteristics

Quartz Bar Mirrors are used for precise control of stages in exposure and inspection equipment.

• Semiconductors/LCD Lithography Equipment

Beam Path, Polishing Characteristics Data

Beam Path

Polishing Characteristics Data

Ceramics Bar Mirrors use materials with high rigidity and low thermal expansion, enabling precise control of stages in exposure and inspection equipment while minimizing deformation caused by temperature changes and self-weight.

• Semiconductors/LCD Lithography Equipment

Beam Path, Polishing Characteristics Data

Beam Path

Polishing Characteristics Data

SiC Ceramic Bar Mirrors take advantage of high hardness, high thermal conductivity, low thermal expansion, and light weight, enabling precise control of stages in exposure and inspection equipment.

• Semiconductors/LCD Lithography Equipment

Beam Path

Beam Path

Polygon Mirrors are rotating polyhedron mirrors with flat reflecting surfaces on the perimeter.

• Laser Printers

Beam Path

Beam Path

Low Scattering Mirrors achieve low loss and high reflectivity through ion beam sputtering (IBS) technology.

• Aviation/Aerospace (Aircraft, Ships, Rockets)

Freeform mirror is a reflective optical element with a complex surface shape that does not have rotational symmetry, and it is a high-performance mirror that can correct multiple aberrations simultaneously.
It enables optical control that is difficult with conventional spherical and aspherical mirrors.

• Medical Equipment
• Semiconductors/LCD Lithography Equipment
• Survey Equipment
• Measuring Instruments
• Projectors