Bar Mirrors are used for the control system in the X-Y stage of lithography equipment. The performance of the X-Y stage determines the required accuracy for the bar mirror. High-precision Bar mirrors show excellent performance. NITTO OPTICAL provides bar mirrors in various sizes and wide selection of materials such as ceramics.
NITTO OPTICAL guarantees the surface flatness below λ using the ZYGO 32"(Φ800) Interferometer and the ZYGO 12" (Φ300) Interferometer.

Size: from 100mm to over 3,500mm.
Surface Flatness from several μm level to λ or less.
Please contact us for details about specifications. (Materials, Shape, Surface Flatness, etc.)

The ultra long bar mirror rages from 2,500mm to over 3,000 mm in length. Nitto Optical is establishing technology for longer sizes.

Polygon Mirrors are rotating polyhedron mirrors with flat reflecting surfaces on the perimeter.

Ring Laser Gyroscope Mirrors are used for an optical gyrocompass element.

The high reflectance is achieved by suppressing the loss and scattering of the incident light occurred at the mirror surface. Ion beam spattering coating method makes it possible to form such mirror.